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Chinese chip making shows progress with new EUV patent from domestic lithography champion

The patent from Shanghai Micro Electronics Equipment is still under review, but producing EUV tools in China would break a monopoly held by ASML.

By: scmp.com

Sep 12 2024
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Chinese chip making shows progress with new EUV patent from domestic lithography champion

The patent from Shanghai Micro Electronics Equipment is still under review, but producing EUV tools in China would break a monopoly held by ASML.

Chinese chip making shows progress with new EUV patent from domestic lithography champion

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