Imec demonstrates logic and DRAM structures using High NA EUV Lithography

These Results confirm the readiness of the High NA EUV patterning ecosystem for enabling future logic and memory use cases.

By: Imec-int.com

Aug 15 2024
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Imec demonstrates logic and DRAM structures using High NA EUV Lithography

LEUVEN (Belgium), August 7, 2024Imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, presents patterned structures obtained after exposure with the 0.55NA EU… [+3349 chars]

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Imec demonstrates logic and DRAM structures using High NA EUV Lithography

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Imec demonstrates logic and DRAM structures using High NA EUV Lithography

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