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Chinese chip making shows progress with new EUV patent from domestic lithography champion

A newly revealed patent from Chinese lithography systems maker Shanghai Micro Electronics Equipment (SMEE) shows how domestic firms could progress in the...


  • Sep 15 2024
  • 3
  • 279 Views
Chinese chip making shows progress with new EUV patent from domestic lithography champion
Chinese chip making shows progress with new EUV patent from domestic lithography champion
A newly revealed patent from Chinese lithography systems maker Shanghai Micro Electronics Equipment (SMEE) shows how domestic firms could progress in the local advanced lithography tools market despi… [+3693 chars]

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