Chinese chip making shows progress with new EUV patent from domestic lithography champion

The patent from Shanghai Micro Electronics Equipment is still under review, but producing EUV tools in China would break a monopoly held by ASML.

Chinese chip making shows progress with new EUV patent from domestic lithography champion

Chinese chip making shows progress with new EUV patent from domestic lithography champion

Chinese chip making shows progress with new EUV patent from domestic lithography champion

Chinese chip making shows progress with new EUV patent from domestic lithography champion

Chinese chip making shows progress with new EUV patent from domestic lithography champion