Imec demonstrates logic and DRAM structures using High NA EUV Lithography

LEUVEN (Belgium), August 7, 2024Imec, a world-leading research and innovation hub in nanoelectronics and digital technologies, presents patterned structures obtained after exposure with the 0.55NA EU… [+3349 chars]

Imec demonstrates logic and DRAM structures using High NA EUV Lithography

Imec demonstrates logic and DRAM structures using High NA EUV Lithography

Imec demonstrates logic and DRAM structures using High NA EUV Lithography

Imec demonstrates logic and DRAM structures using High NA EUV Lithography

Imec demonstrates logic and DRAM structures using High NA EUV Lithography